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Intersema - PRESSURE SENSOR DIE

Numéro de référence MS7930
Description PRESSURE SENSOR DIE
Fabricant Intersema 
Logo Intersema 





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MS7930 fiche technique
MS7930
PRESSURE SENSOR DIE (0-30 BAR)
0 to 3000 kPa range (30 bar or 435 PSI)
Absolute/differential pressure sensors
High linearity, small size
RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS7930 consists of a silicon micro-machined membrane. Implanted resistors make
use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This
sensor, which has outstanding linearity and span values, is available in various configurations. The absolute
pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer
used for this sealing has a thickness of 0.2 mm (MS7930-A_0.2) or 0.5 mm (MS7930-A_0.5). There are two
gauge versions available: one with a drilled Pyrex glass (MS7930-D) and the other without Pyrex glass
(MS7930-S).
FEATURES
Uncompensated pressure sensor die
Output span 150mV @ 5V
Temperature range -40°…+125°C
Linearity 0.05% (typical)
Very small die size 1.72 x 1.58 mm (MS7930-A)
Low cost, high reliability
APPLICATION
Absolute pressure sensor systems
Differential/gauge pressure sensor systems
Engine controls
Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ EPI
Out+
Out-
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
GND1 GND2
1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7930_000.doc
000079301500
ECN 1205
March 9, 2009
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