PDF MS7970 Data sheet ( Hoja de datos )

Número de pieza	MS7970
Descripción	PRESSURE SENSOR DIE
Fabricantes	Intersema
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No Preview Available ! MS7970 PRESSURE SENSOR DIE (0-70 BAR) • 0 to 7000 kPa range (70 bar or 1015 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7970 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7970-A_0.2) or 0.5 mm (MS7970-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7970-D) and the other without Pyrex glass (MS7970-S). FEATURES • Uncompensated pressure sensor die • Output span 310mV @ 5V • Temperature range -40°…+125°C • Linearity 0.25% (typical) • Very small die size 1.72 x 1.58 mm (MS7970-A) • Low cost, high reliability APPLICATION • Absolute pressure sensor systems • Differential/gauge pressure sensor systems • Engine controls • Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground GND1 GND2 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). DA7970_000.doc 000079701592 ECN 1205 May 11, 2009 1/5 1 page ORDERING INFORMATION Product Code MS7970-A_0.2 MS7970-A_0.5 MS7970-D MS7970-S Type Absolute Absolute Differential Differential Product 70 bar Pressure Sensors 0.2 mm Pyrex sawn on b/f 70 bar Pressure Sensors 0.5 mm Pyrex sawn on b/f 70 bar Pressure Sensors sawn on b/f 70 bar Pressure Sensors no Pyrex sawn on b/f Art.-Nr. 797025022 797025021 797025121 797025221 The MS7970 dice are supplied sawn on blue foil, mounted on plastic rings. FACTORY AND SALES CONTACTS Factory and European Sales office Intersema Sensoric SA Ch. Chapons-des-Prés 11 CH-2022 Bevaix Switzerland Phone: Fax: e-mail: Website: +41 32 847 9550 +41 32 847 9569 www.intersema.ch USA Measurement Specialties Inc. 1000 Lucas Way Hampton, VA 23666 USA Phone: Fax: e-mail: Website: +1 800 555 1551 +1 757 766 4297 [email protected] www.meas-spec.com ASIA Measurement Specialties (China), Ltd. F1.6-4D, Tian An Development Compound Shenzhen, China 518048 Phone: Fax: e-mail: Website: +86 755 8330 1004 +86 755 8330 6797 [email protected] www.meas-spec.com NOTICE Intersema reserves the right to make changes to the products contained in this data sheet in order to improve the design or performance and to supply the best possible products. Intersema assumes no responsibility for the use of any circuits shown in this data sheet, conveys no license under any patent or other rights unless otherwise specified in this data sheet, and makes no claim that the circuits are free from patent infringement. Applications for any devices shown in this data sheet are for illustration only and Intersema makes no claim or warranty that such applications will be suitable for the use specified without further testing or modification. DA7970_000.doc 000079701592 ECN 1205 May 11, 2009 5/5 5 Page

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